Myers Vacuum provides support for most types of Diffusion Pumps providing services to rebuild/ repair complete pumps replacing heaters, jet assemblies, cooling lines and pumps base assemblies as required. Myers also provides parts for user support as replacement heaters, jet assemblies, gaskets, etc.
Replacement Diffusion Pump Heater Reference
Find replacement heaters by manufacturer, pump size, and electrical rating. Contact Myers Vacuum for price and delivery.
| Heater Replacement Guide:Cooke Vacuum Products | ||||||
|---|---|---|---|---|---|---|
| Pump Size |
Pump Model |
Heaters per pump |
Watts | Volts | Cooke Vacuum Part no. |
Heater Type |
|
4″
|
DPD-4-1250
|
1
|
1350W
|
115V
|
621-04
|
platen
|
|
4″
|
DPD-4-1250
|
1
|
1350W
|
230V
|
622-04
|
platen
|
|
6″
|
DPD-6-2400
|
1
|
2150W
|
230V
|
622-06
|
platen
|
|
all sizes
|
various
|
1
|
as required
|
as required
|
custom
|
platen
|
| Heater Replacement Guide: CVC Products | ||||||
|---|---|---|---|---|---|---|
| Pump Size |
Pump Model |
Heaters per pump |
Watts | Volts | CVC ProductsPart No. |
Heater Type |
|
2″
|
PMC-2
|
1
|
300W
|
115V
|
65192
|
CARTRIDGE
|
|
2″
|
PMC-2
|
1
|
300W
|
208V
|
65192-2
|
CARTRIDGE
|
|
2″
|
PMC-2
|
1
|
300W
|
230V
|
65192-1
|
CARTRIDGE
|
|
4″
|
PMC-4
|
4
|
300W
|
115V
|
65192
|
CARTRIDGE
|
|
4″
|
PMC-4
|
4
|
300W
|
208V
|
65192-2
|
CARTRIDGE
|
|
4″
|
PMC-4
|
4
|
300W
|
230V
|
65192-1
|
CARTRIDGE
|
|
6″
|
PMC-6
|
6
|
300W
|
115V
|
65192
|
CARTRIDGE
|
|
6″
|
PMC-6
|
6
|
300W
|
208V
|
65192-2
|
CARTRIDGE
|
|
6″
|
PMC-6
|
6
|
300W
|
230V
|
65192-1
|
CARTRIDGE
|
|
6″
|
PVMS-10
|
1
|
2200W
|
230V
|
285801-2
|
PLATEN
|
|
10″
|
PMC-10
|
18
|
250W
|
208V
|
270819-0002
|
CARTRIDGE
|
|
10″
|
PMC-10
|
18
|
250W
|
230V
|
270819
|
CARTRIDGE
|
|
10″
|
PVMS-11,-12
|
1
|
5000W
|
230V
|
281463-1
|
PLATEN
|
|
10″
|
PVMS-11,-12
|
1
|
5000W
|
460V
|
281463-2
|
PLATEN
|
|
16″
|
PVM-16
|
6
|
1600W
|
230V
|
281760-2
|
PLATEN
|
|
20″
|
PVM-20
|
36
|
350W
|
115V
|
5507892-0001
|
PLATEN
|
|
20″
|
PMC-20C
|
INNER
|
4310W
|
230V
|
269933-1
|
RING
|
|
20″
|
PMC-20C
|
INNER
|
4310W
|
460V
|
269933-3/5
|
RING
|
|
20″
|
PMC-20C
|
OUTER
|
6690W
|
230V
|
269933-2
|
RING
|
|
20″
|
PMC-20C
|
OUTER
|
6690W
|
460V
|
269933-4/6
|
RING
|
|
32″
|
PVM-32
|
30
|
750W
|
115V
|
279503-0001
|
PLATEN
|
|
32″
|
PVM-32
|
30
|
750W
|
230V
|
279503-0002
|
PLATEN
|
|
35″, 48″
|
PMC-32C,-48C
|
INNER
|
8930W
|
230V
|
269217-5
|
RING
|
|
35″, 48″
|
PMC-32C,-48C
|
INNER
|
8930W
|
460V
|
269217-1/3
|
RING
|
|
35″, 48″
|
PMC-32C,-48C
|
OUTER
|
11350W
|
230V
|
269217-6
|
RING
|
|
35″, 48″
|
PMC-32C,-48C
|
OUTER
|
11350W
|
460V
|
269217-2/4
|
RING
|
| Heater Replacement Guide: Edwards High Vacuum | ||||||
|---|---|---|---|---|---|---|
| Pump Size |
Pump Model |
Heaters per pump |
Watts | Volts | Edwards Heater No. | Heater Type |
|
4″
|
SI100
|
1
|
250W
|
120V
|
CARTRIDGE
|
|
|
4″
|
E04
|
1
|
850W
|
120V
|
H017-00-140
|
PLATEN
|
|
4″
|
E04
|
1
|
850W
|
240V
|
H017-00-137
|
PLATEN
|
|
6″
|
E06
|
1
|
1350W
|
120V
|
H017-00-59 & 102
|
PLATEN
|
|
6″
|
E06
|
1
|
1350W
|
240V
|
H017-00-54 & 113
|
PLATEN
|
|
9″
|
E09
|
1
|
2250W
|
120V
|
H017-00-161 & 132
|
PLATEN
|
|
9″
|
E09
|
1
|
2250W
|
240V
|
H017-00-158 & 137
|
PLATEN
|
|
10″
|
HT10
|
3
|
1700W
|
220V
|
26906-016
|
PLATEN
|
|
10″
|
HT10
|
3
|
1700W
|
460V
|
26906-013
|
PLATEN
|
|
12″
|
E012
|
3
|
1600W
|
120V
|
H017-00-181 & 102
|
PLATEN
|
|
12″
|
E012
|
3
|
1600W
|
240V
|
H017-00-179 & 113
|
PLATEN
|
|
16″
|
HT16
|
6
|
1500W
|
220V
|
26906-023
|
PLATEN
|
|
16″
|
HT16
|
6
|
1500W
|
460V
|
26906-019
|
PLATEN
|
|
18″
|
18B4
|
3
|
2000W
|
220V
|
26906-026
|
PLATEN
|
|
18″
|
18B4
|
3
|
2000W
|
460V
|
26906-030
|
PLATEN
|
|
20″
|
HT20
|
6
|
2100W
|
220V
|
26906-033
|
PLATEN
|
|
20″
|
HT20
|
6
|
2100W
|
460V
|
26906-037
|
PLATEN
|
| Heater Replacement Guide: Leybold Vacuum Diffusion Pumps | ||||||
|---|---|---|---|---|---|---|
| Pump Size |
Pump Model |
Heaters per pump |
Watts | Volts | Leybold No. | Heater Type |
|
10″
|
DIP 3 000
|
2
|
1250W
|
230V
|
200 05 457
|
CARTRIDGE
|
|
16″
|
DIP 8 000
|
6
|
800W
|
230V
|
200 05 458
|
CARTRIDGE
|
|
20″
|
DIP 12 000
|
9
|
800W
|
230V
|
200 05 458
|
CARTRIDGE
|
|
26″
|
DIP 20 000
|
12
|
1000W
|
230V
|
200 05 459
|
CARTRIDGE
|
|
32″
|
DIP 30 000
|
18
|
1000W
|
230V
|
200 05 459
|
CARTRIDGE
|
|
39″
|
DIP 50 000
|
24
|
1000W
|
230V
|
200 05 459
|
CARTRIDGE
|
| Heater Replacement Guide: TORR Vacuum Diffusion Pumps | ||||||
|---|---|---|---|---|---|---|
| Pump Size |
Pump Model |
Heaters per pump |
Watts | Volts | TORR No. |
Heater Type |
|
6″
|
R-620
|
1
|
1950W
|
208V
|
957101
|
PLATEN
|
|
10″
|
R-1020
|
1
|
4300W
|
208V
|
957111
|
PLATEN
|
| Heater Replacement Guide: Varian/NRC | ||||||
|---|---|---|---|---|---|---|
| Pump Size |
Pump Model |
Heaters per pump |
Watts | Volts | Varian/NRC Heater No. |
Heater Type |
|
2″
|
HSA
|
1
|
350W
|
120V
|
0181-6473-01-100
|
CARTRIDGE
|
|
2″
|
HS-2
|
1
|
450W
|
120V
|
0181-6473-02-125
|
CARTRIDGE
|
|
2″
|
M-2
|
1
|
450W
|
120V
|
0181-6472-03-120
|
PLATEN
|
|
4″
|
H4X, VHS-4
|
1
|
1450W
|
120V
|
0181-6473-04-205
|
PLATEN
|
|
4″
|
H4X, VHS-4
|
1
|
1450W
|
208V
|
0181-6473-210
|
PLATEN
|
|
4″
|
H4X, VHS-4
|
1
|
1450W
|
240V
|
0181-6473-04-250
|
PLATEN
|
|
4″
|
M-4, NHS-4
|
1
|
1190W
|
120
|
0181-6473-04-100
|
PLATEN
|
|
4″
|
M-4, NHS-4
|
1
|
1190W
|
240
|
0181-6473-04-200
|
PLATEN
|
|
4″
|
VARIOUS
|
1
|
AS REQUIRED
|
—
|
PLATEN
|
|
|
4″
|
HS4/0161
|
1
|
1000W
|
120V
|
0181-6473-04-004
|
PLATEN
|
|
4″
|
VARIOUS
|
1
|
AS REQUIRED
|
—
|
PLATEN
|
|
|
6″
|
VHS-6, VS250
|
1
|
2200W
|
120V
|
0181-6473-06-125
|
PLATEN
|
|
6″
|
VHS-6, VHS250
|
1
|
2200W
|
208V
|
0181-6473-06-175
|
PLATEN
|
|
6″
|
VHS-6, VHS250
|
1
|
2200W
|
240V
|
0181-6473-06-225
|
PLATEN
|
|
6″
|
VHS-6, VHS250
|
1
|
2200W
|
480V
|
NOT LISTED
|
PLATEN
|
|
6″
|
M-6, NHS-6
|
1
|
1785W
|
120V
|
0181-6473-06-100
|
PLATEN
|
|
6″
|
M-6, NHS-6
|
1
|
1500W
|
208V
|
0181-6473-06-150
|
PLATEN
|
|
6″
|
M-6, NHS-6
|
1
|
1785W
|
240V
|
0181-6473-06-200
|
PLATEN
|
|
6″
|
VARIOUS
|
1
|
AS REQUIRED
|
PLATEN
|
||
|
6″
|
HS6/0162
|
1
|
1800W
|
120V
|
0181-6473-01-005
|
PLATEN
|
|
6″
|
HS6/0162
|
1
|
1800W
|
240V
|
0181-6473-01-006
|
PLATEN
|
|
6″
|
VARIOUS
|
1
|
AS REQUIRED
|
PLATEN
|
||
|
10″
|
HS-10
|
1
|
3900W
|
208V
|
NOT LISTED
|
PLATEN
|
|
10″
|
HS-10
|
1
|
3900W
|
240V
|
NOT LISTED
|
PLATEN
|
|
10″
|
HS-10
|
1
|
3900W
|
480V
|
NOT LISTED
|
PLATEN
|
|
10″
|
HS-10
|
1
|
3300W
|
480V
|
0180-6473-10-230
|
PLATEN
|
|
10″
|
VARIOUS
|
1
|
AS REQUIRED
|
PLATEN
|
||
|
10″
|
VHS-10, HS400
|
1
|
5000W
|
208V
|
NOT LISTED
|
PLATEN
|
|
10″
|
VHS-10, HS400
|
1
|
5000W
|
240V
|
NOT LISTED
|
PLATEN
|
|
10″
|
VHS-10, HS400
|
1
|
5000W
|
480V
|
NOT LISTED
|
PLATEN
|
|
10″
|
VHS-10, HS400
|
1
|
4400W
|
208V
|
0181-6473-10-140 (x2)
|
PLATEN
|
|
10″
|
VHS-10, HS400
|
1
|
4400W
|
240V
|
0181-6473-10-150 (x2)
|
PLATEN
|
|
10″
|
VHS-10, HS400
|
1
|
4400W
|
480V
|
0181-6473-10-170 (x2)
|
PLATEN
|
|
10″
|
VARIOUS
|
1
|
AS REQUIRED
|
PLATEN
|
||
|
16″
|
HS-16
|
3
|
3200W
|
240V
|
NOT LISTED
|
PLATEN
|
|
16″
|
HS-16
|
3
|
3200W
|
480V
|
NOT LISTED
|
PLATEN
|
|
16″
|
HS-16
|
3
|
2700W
|
240V
|
0181-6473-16-035
|
PLATEN
|
|
16″
|
HS-16
|
3
|
2700W
|
480V
|
0181-6473-16-045
|
PLATEN
|
|
16″
|
VARIOUS
|
3
|
AS REQUIRED
|
PLATEN
|
||
|
20″
|
HS-20
|
6
|
2400W
|
240V
|
NOT LISTED
|
PLATEN
|
|
20″
|
HS-20
|
6
|
2400W
|
480V
|
NOT LISTED
|
PLATEN
|
|
20″
|
HS-20
|
6
|
2000W
|
240V
|
0181-6473-20-060
|
PLATEN
|
|
20″
|
HS-20
|
6
|
2000W
|
480V
|
0181-6473-20-070
|
PLATEN
|
|
20″
|
HS-20
|
6
|
AS REQUIRED
|
PLATEN
|
||
|
32″
|
HS-32
|
6
|
4000W
|
240V
|
0181-6473-32-075
|
PLATEN
|
|
32″
|
HS-32
|
6
|
4000W
|
480V
|
0181-6473-32-075
|
PLATEN
|
|
32″
|
VARIOUS
|
6
|
AS REQUIRED
|
PLATEN
|
||
|
35″
|
NHS-35
|
6
|
4000W
|
240V
|
0181-6472-35-248
|
PLATEN
|
|
35″
|
NHS-35
|
6
|
4000W
|
480V
|
0181-6472-35-248
|
PLATEN
|
|
35″
|
VARIOUS
|
6
|
AS REQUIRED
|
PLATEN
|
||
