CVC 601 LL Load Lock (in good condition) with RF Etch
for conversion of CVC 601 sputtering system to Load Lock
.
- Chamber top plate assembly and hoist
- Heavy Duty Hoist
- Loadlock Chamber with Cassette
- Roughing Manifold
- RF Etch Assembly with Matchbox ( Matchbox is missing bias pickup)
- Rotostrate Titanium Table with Pallets ( Missing center hub)
CVC 601 Sputtering System
- Three (3) 8″ DCPED Sputter up targets
- One (1) 8″ RFPED Sputter up target
- Pumping system CTI 8 Cryo Pump w/ water cooled compressor
- SW 1397
- Lid hoist
- One (1) Plasma Therm 3 KW RF Generator with Tuning P.S.
- GIC 400 CVC Ion Gauge
- GP 310 CVC Pirani Gauge
- Anode Control for triode Clean
- CVC Model K4 DC Power Supply
CVC DC Target Selector
- P/N 289490 used on 2800 and 601
CVC 2800 Data Acquisition Center Module
- No picture available
- Used Module
Power Panel for CVC 2800
- P/N 289703 CVC
CVC Water Interlock Control
- No picture available
- P/N 289703 Used on 2800 and 601
CVC 2800 Inter Door Drive Assembly
- No picture available
- with Bellows
